Cubic structured HfLaO dielectrics for MIM capacitor for RF IC applications

10.1149/1.3122120

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Bibliographic Details
Main Authors: Zhang, L., He, W., Chan, D.S.H., Cho, B.J.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/83597
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Institution: National University of Singapore