Cubic structured HfLaO dielectrics for MIM capacitor for RF IC applications

10.1149/1.3122120

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Bibliographic Details
Main Authors:	Zhang, L., He, W., Chan, D.S.H., Cho, B.J.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/83597
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-83597
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spelling	sg-nus-scholar.10635-835972015-01-08T09:33:19Z Cubic structured HfLaO dielectrics for MIM capacitor for RF IC applications Zhang, L. He, W. Chan, D.S.H. Cho, B.J. ELECTRICAL & COMPUTER ENGINEERING 10.1149/1.3122120 ECS Transactions 19 2 615-623 2014-10-07T04:43:00Z 2014-10-07T04:43:00Z 2009 Conference Paper Zhang, L.,He, W.,Chan, D.S.H.,Cho, B.J. (2009). Cubic structured HfLaO dielectrics for MIM capacitor for RF IC applications. ECS Transactions 19 (2) : 615-623. ScholarBank@NUS Repository. <a href="https://doi.org/10.1149/1.3122120" target="_blank">https://doi.org/10.1149/1.3122120</a> 9781566777100 19385862 http://scholarbank.nus.edu.sg/handle/10635/83597 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
description	10.1149/1.3122120
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Zhang, L. He, W. Chan, D.S.H. Cho, B.J.
format	Conference or Workshop Item
author	Zhang, L. He, W. Chan, D.S.H. Cho, B.J.
spellingShingle	Zhang, L. He, W. Chan, D.S.H. Cho, B.J. Cubic structured HfLaO dielectrics for MIM capacitor for RF IC applications
author_sort	Zhang, L.
title	Cubic structured HfLaO dielectrics for MIM capacitor for RF IC applications
title_short	Cubic structured HfLaO dielectrics for MIM capacitor for RF IC applications
title_full	Cubic structured HfLaO dielectrics for MIM capacitor for RF IC applications
title_fullStr	Cubic structured HfLaO dielectrics for MIM capacitor for RF IC applications
title_full_unstemmed	Cubic structured HfLaO dielectrics for MIM capacitor for RF IC applications
title_sort	cubic structured hflao dielectrics for mim capacitor for rf ic applications
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/83597
_version_	1681089465220595712

Cubic structured HfLaO dielectrics for MIM capacitor for RF IC applications

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