Cubic structured HfLaO dielectrics for MIM capacitor for RF IC applications

• Main Authors: Zhang, L., He, W., Chan, D.S.H., Cho, B.J.
• Other Authors: ELECTRICAL & COMPUTER ENGINEERING
• Format: Conference or Workshop Item
• Published: 2014
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/83597
• Institution: National University of Singapore

10.1149/1.3122120