Design of novel integrated MIM capacitors for high self resonant frequency and capacity density

Radio frequency (RF) and mixed signal integrated circuits use capacitor elements for decoupling, filtering and oscillating etc. Traditionally, capacitors are fabricated by building parallel plate metal structures using two or more layers of metal in the integrated circuits to form what is known popu...

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Bibliographic Details
Main Author: Gwee, Su Feng.
Other Authors: Wang Hong
Format: Theses and Dissertations
Language:English
Published: 2012
Subjects:
Online Access:http://hdl.handle.net/10356/50959
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Institution: Nanyang Technological University
Language: English
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