Formation of microscale and nanoscale structures on surface irradiated with energetic beams

Very small (microscale or nanoscale) structures, which are the building blocks of future technologies, are very difficult to fabricate by conventional materials processing methods. The project aimed to explore use of energetic beams, mainly focused ion beam (FIB), as a tool to produce microscale and...

Full description

Saved in:
Bibliographic Details
Main Author: Qian, Haixia
Other Authors: Zhou Wei
Format: Theses and Dissertations
Published: 2008
Subjects:
Online Access:https://hdl.handle.net/10356/5262
Tags: Add Tag
No Tags, Be the first to tag this record!
Institution: Nanyang Technological University