Formation of microscale and nanoscale structures on surface irradiated with energetic beams
Very small (microscale or nanoscale) structures, which are the building blocks of future technologies, are very difficult to fabricate by conventional materials processing methods. The project aimed to explore use of energetic beams, mainly focused ion beam (FIB), as a tool to produce microscale and...
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| Format: | Theses and Dissertations |
| Published: |
2008
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| Online Access: | https://hdl.handle.net/10356/5262 |
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| Institution: | Nanyang Technological University |