Formation of microscale and nanoscale structures on surface irradiated with energetic beams

Formation of microscale and nanoscale structures on surface irradiated with energetic beams

Very small (microscale or nanoscale) structures, which are the building blocks of future technologies, are very difficult to fabricate by conventional materials processing methods. The project aimed to explore use of energetic beams, mainly focused ion beam (FIB), as a tool to produce microscale and...

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Main Author: Qian, Haixia
Other Authors: Zhou Wei
Format: Theses and Dissertations
Published: 2008
Subjects:
DRNTU::Engineering::Materials::Nanostructured materials
Online Access:https://hdl.handle.net/10356/5262
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Institution: Nanyang Technological University
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spelling sg-ntu-dr.10356-52622023-03-11T17:35:38Z Formation of microscale and nanoscale structures on surface irradiated with energetic beams Qian, Haixia Zhou Wei School of Mechanical and Aerospace Engineering DRNTU::Engineering::Materials::Nanostructured materials Very small (microscale or nanoscale) structures, which are the building blocks of future technologies, are very difficult to fabricate by conventional materials processing methods. The project aimed to explore use of energetic beams, mainly focused ion beam (FIB), as a tool to produce microscale and nanoscale periodic structures. A wide range of materials, including pure metals (Sn and Ti), thin film (ZnO) and semiconductors (Si, InP and GaAs), were studied in order to gain a good understanding of ion-solid interactions during fabrication using FIB. DOCTOR OF PHILOSOPHY (MPE) 2008-09-17T10:46:35Z 2008-09-17T10:46:35Z 2006 2006 Thesis Qian, H. (2006). Formation of microscale and nanoscale structures on surface irradiated with energetic beams. Doctoral thesis, Nanyang Technological University, Singapore. https://hdl.handle.net/10356/5262 10.32657/10356/5262 Nanyang Technological University application/pdf
institution Nanyang Technological University
building NTU Library
continent Asia
country Singapore
Singapore
content_provider NTU Library
collection DR-NTU
topic DRNTU::Engineering::Materials::Nanostructured materials
spellingShingle DRNTU::Engineering::Materials::Nanostructured materials
Qian, Haixia
Formation of microscale and nanoscale structures on surface irradiated with energetic beams
description Very small (microscale or nanoscale) structures, which are the building blocks of future technologies, are very difficult to fabricate by conventional materials processing methods. The project aimed to explore use of energetic beams, mainly focused ion beam (FIB), as a tool to produce microscale and nanoscale periodic structures. A wide range of materials, including pure metals (Sn and Ti), thin film (ZnO) and semiconductors (Si, InP and GaAs), were studied in order to gain a good understanding of ion-solid interactions during fabrication using FIB.
author2 Zhou Wei
author_facet Zhou Wei
Qian, Haixia
format Theses and Dissertations
author Qian, Haixia
author_sort Qian, Haixia
title Formation of microscale and nanoscale structures on surface irradiated with energetic beams
title_short Formation of microscale and nanoscale structures on surface irradiated with energetic beams
title_full Formation of microscale and nanoscale structures on surface irradiated with energetic beams
title_fullStr Formation of microscale and nanoscale structures on surface irradiated with energetic beams
title_full_unstemmed Formation of microscale and nanoscale structures on surface irradiated with energetic beams
title_sort formation of microscale and nanoscale structures on surface irradiated with energetic beams
publishDate 2008
url https://hdl.handle.net/10356/5262
_version_ 1761781913925713920

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