Characterization of semiconductor process parameters

• Main Author: Gan, Chin Ngap
• Other Authors: Yoon Soon Fatt
• Format: Final Year Project
• Language: English
• Published: 2013
• Subjects: DRNTU::Engineering::Electrical and electronic engineering::Microelectronics; DRNTU::Engineering::Materials::Material testing and characterization; DRNTU::Engineering::Electrical and electronic engineering::Semiconductors
• Online Access: http://hdl.handle.net/10356/53005
• Institution: Nanyang Technological University

Silicon, being the most mature technology in the electronics industry, is facing limitations and challenges that threaten to displace Moore’s Law as device sizes get increasingly smaller. The monolithic integration of III-V to Silicon via wafer bonding will marry the advantages of both platforms for...