Development of MEMS RF inductors on silicon wafers
In this project, a micromachined inductor on silicon wafer is presented.
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| Main Author: | |
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| Format: | Theses and Dissertations |
| Published: |
2008
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| Online Access: | http://hdl.handle.net/10356/5336 |
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| Institution: | Nanyang Technological University |
| Summary: | In this project, a micromachined inductor on silicon wafer is presented. |
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