Development of MEMS RF inductors on silicon wafers

In this project, a micromachined inductor on silicon wafer is presented.

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Bibliographic Details
Main Author:	Wang, Guang Yu
Other Authors:	Miao, Jianmin
Format:	Theses and Dissertations
Published:	2008
Subjects:	DRNTU::Engineering::Manufacturing
Online Access:	http://hdl.handle.net/10356/5336
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Institution:	Nanyang Technological University

id	sg-ntu-dr.10356-5336
record_format	dspace
spelling	sg-ntu-dr.10356-53362023-03-11T16:54:12Z Development of MEMS RF inductors on silicon wafers Wang, Guang Yu Miao, Jianmin School of Mechanical and Production Engineering DRNTU::Engineering::Manufacturing In this project, a micromachined inductor on silicon wafer is presented. Master of Science (Precision Engineering) 2008-09-17T10:48:02Z 2008-09-17T10:48:02Z 2002 2002 Thesis http://hdl.handle.net/10356/5336 Nanyang Technological University application/pdf
institution	Nanyang Technological University
building	NTU Library
continent	Asia
country	Singapore Singapore
content_provider	NTU Library
collection	DR-NTU
topic	DRNTU::Engineering::Manufacturing
spellingShingle	DRNTU::Engineering::Manufacturing Wang, Guang Yu Development of MEMS RF inductors on silicon wafers
description	In this project, a micromachined inductor on silicon wafer is presented.
author2	Miao, Jianmin
author_facet	Miao, Jianmin Wang, Guang Yu
format	Theses and Dissertations
author	Wang, Guang Yu
author_sort	Wang, Guang Yu
title	Development of MEMS RF inductors on silicon wafers
title_short	Development of MEMS RF inductors on silicon wafers
title_full	Development of MEMS RF inductors on silicon wafers
title_fullStr	Development of MEMS RF inductors on silicon wafers
title_full_unstemmed	Development of MEMS RF inductors on silicon wafers
title_sort	development of mems rf inductors on silicon wafers
publishDate	2008
url	http://hdl.handle.net/10356/5336
_version_	1761782036017709056

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