Characterization of aluminium pad under different process conditions

The objective of this study is to improve the aluminum film uniformity by optimizing the process condition. The aluminum film was deposited by a sputtering process on 200mm wafers in AMAT Endura® PVD chambers.

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Bibliographic Details
Main Author:	Wang, Jian Hua.
Other Authors:	Zhong, Zhaowei
Format:	Theses and Dissertations
Published:	2008
Subjects:	DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films
Online Access:	http://hdl.handle.net/10356/5340
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Institution:	Nanyang Technological University

id	sg-ntu-dr.10356-5340
record_format	dspace
spelling	sg-ntu-dr.10356-53402023-03-11T17:17:59Z Characterization of aluminium pad under different process conditions Wang, Jian Hua. Zhong, Zhaowei School of Mechanical and Production Engineering DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films The objective of this study is to improve the aluminum film uniformity by optimizing the process condition. The aluminum film was deposited by a sputtering process on 200mm wafers in AMAT Endura® PVD chambers. Master of Science (Precision Engineering) 2008-09-17T10:48:09Z 2008-09-17T10:48:09Z 2004 2004 Thesis http://hdl.handle.net/10356/5340 Nanyang Technological University application/pdf
institution	Nanyang Technological University
building	NTU Library
continent	Asia
country	Singapore Singapore
content_provider	NTU Library
collection	DR-NTU
topic	DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films
spellingShingle	DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films Wang, Jian Hua. Characterization of aluminium pad under different process conditions
description	The objective of this study is to improve the aluminum film uniformity by optimizing the process condition. The aluminum film was deposited by a sputtering process on 200mm wafers in AMAT Endura® PVD chambers.
author2	Zhong, Zhaowei
author_facet	Zhong, Zhaowei Wang, Jian Hua.
format	Theses and Dissertations
author	Wang, Jian Hua.
author_sort	Wang, Jian Hua.
title	Characterization of aluminium pad under different process conditions
title_short	Characterization of aluminium pad under different process conditions
title_full	Characterization of aluminium pad under different process conditions
title_fullStr	Characterization of aluminium pad under different process conditions
title_full_unstemmed	Characterization of aluminium pad under different process conditions
title_sort	characterization of aluminium pad under different process conditions
publishDate	2008
url	http://hdl.handle.net/10356/5340
_version_	1761781798469107712

Characterization of aluminium pad under different process conditions

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