Design of an optical MEMS flow sensor in CMOS technology
Miniaturization is a popular topic in today's semiconductor's industry, the chip size has dropped to micrometer level and dimension of transistor has dropped to nanometer level up to date. Therefore the accuracy becomes the bottleneck of the manufacturing process in the semiconductor indus...
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sg-ntu-dr.10356-54032023-03-11T17:08:01Z Design of an optical MEMS flow sensor in CMOS technology Wu, Dong Qin. Chollet, Franck Alexis School of Mechanical and Aerospace Engineering DRNTU::Engineering::Manufacturing Miniaturization is a popular topic in today's semiconductor's industry, the chip size has dropped to micrometer level and dimension of transistor has dropped to nanometer level up to date. Therefore the accuracy becomes the bottleneck of the manufacturing process in the semiconductor industry. If there is one-micrometer deviation error in a rotor of a precise watch, the watch will still be able to tell the user the accurate time and be considered as a good end product. When one-micrometer deviation error happens to a micro-meter-level transistor chip, it becomes a ratal error. The deviation error causes bad final products. Master of Science (Mechanics & Processing of Materials) 2008-09-17T10:49:44Z 2008-09-17T10:49:44Z 2006 2006 Thesis http://hdl.handle.net/10356/5403 Nanyang Technological University application/pdf |
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DRNTU::Engineering::Manufacturing Wu, Dong Qin. Design of an optical MEMS flow sensor in CMOS technology |
| description |
Miniaturization is a popular topic in today's semiconductor's industry, the chip size has dropped to micrometer level and dimension of transistor has dropped to nanometer level up to date. Therefore the accuracy becomes the bottleneck of the manufacturing process in the semiconductor industry. If there is one-micrometer deviation error in a rotor of a precise watch, the watch will still be able to tell the user the accurate time and be considered as a good end product. When one-micrometer deviation error happens to a micro-meter-level transistor chip, it becomes a ratal error. The deviation error causes bad final products. |
| author2 |
Chollet, Franck Alexis |
| author_facet |
Chollet, Franck Alexis Wu, Dong Qin. |
| format |
Theses and Dissertations |
| author |
Wu, Dong Qin. |
| author_sort |
Wu, Dong Qin. |
| title |
Design of an optical MEMS flow sensor in CMOS technology |
| title_short |
Design of an optical MEMS flow sensor in CMOS technology |
| title_full |
Design of an optical MEMS flow sensor in CMOS technology |
| title_fullStr |
Design of an optical MEMS flow sensor in CMOS technology |
| title_full_unstemmed |
Design of an optical MEMS flow sensor in CMOS technology |
| title_sort |
design of an optical mems flow sensor in cmos technology |
| publishDate |
2008 |
| url |
http://hdl.handle.net/10356/5403 |
| _version_ |
1761781836107743232 |