Design of an optical MEMS flow sensor in CMOS technology
Miniaturization is a popular topic in today's semiconductor's industry, the chip size has dropped to micrometer level and dimension of transistor has dropped to nanometer level up to date. Therefore the accuracy becomes the bottleneck of the manufacturing process in the semiconductor indus...
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| Format: | Theses and Dissertations |
| Published: |
2008
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| Online Access: | http://hdl.handle.net/10356/5403 |
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| Institution: | Nanyang Technological University |
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