Studies on digital holography and interferometric application in micromeasurement

With the aim to improve the system performance and further extend the application scope to the rapidly growing microelectromechanical system (MEMS) engineering, the methodology of in-line digital micro-holo-interferometry (IDMHI) is proposed and its performance in micromeasurement is studied in thi...

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Bibliographic Details
Main Author: Xu, Lei.
Other Authors: Miao, Jianmin
Format: Theses and Dissertations
Published: 2008
Subjects:
Online Access:http://hdl.handle.net/10356/5436
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Institution: Nanyang Technological University