Studies on digital holography and interferometric application in micromeasurement

With the aim to improve the system performance and further extend the application scope to the rapidly growing microelectromechanical system (MEMS) engineering, the methodology of in-line digital micro-holo-interferometry (IDMHI) is proposed and its performance in micromeasurement is studied in thi...

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Bibliographic Details
Main Author:	Xu, Lei.
Other Authors:	Miao, Jianmin
Format:	Theses and Dissertations
Published:	2008
Subjects:	DRNTU::Engineering::Manufacturing::Metrology
Online Access:	http://hdl.handle.net/10356/5436
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Institution:	Nanyang Technological University

id	sg-ntu-dr.10356-5436
record_format	dspace
spelling	sg-ntu-dr.10356-54362023-03-11T17:11:07Z Studies on digital holography and interferometric application in micromeasurement Xu, Lei. Miao, Jianmin School of Mechanical and Production Engineering Asundi, Anand Krishna DRNTU::Engineering::Manufacturing::Metrology With the aim to improve the system performance and further extend the application scope to the rapidly growing microelectromechanical system (MEMS) engineering, the methodology of in-line digital micro-holo-interferometry (IDMHI) is proposed and its performance in micromeasurement is studied in this thesis. In this thesis, the pressure sensor is employed as a typical example. Doctor of Philosophy (MPE) 2008-09-17T10:50:33Z 2008-09-17T10:50:33Z 2003 2003 Thesis http://hdl.handle.net/10356/5436 Nanyang Technological University application/pdf
institution	Nanyang Technological University
building	NTU Library
continent	Asia
country	Singapore Singapore
content_provider	NTU Library
collection	DR-NTU
topic	DRNTU::Engineering::Manufacturing::Metrology
spellingShingle	DRNTU::Engineering::Manufacturing::Metrology Xu, Lei. Studies on digital holography and interferometric application in micromeasurement
description	With the aim to improve the system performance and further extend the application scope to the rapidly growing microelectromechanical system (MEMS) engineering, the methodology of in-line digital micro-holo-interferometry (IDMHI) is proposed and its performance in micromeasurement is studied in this thesis. In this thesis, the pressure sensor is employed as a typical example.
author2	Miao, Jianmin
author_facet	Miao, Jianmin Xu, Lei.
format	Theses and Dissertations
author	Xu, Lei.
author_sort	Xu, Lei.
title	Studies on digital holography and interferometric application in micromeasurement
title_short	Studies on digital holography and interferometric application in micromeasurement
title_full	Studies on digital holography and interferometric application in micromeasurement
title_fullStr	Studies on digital holography and interferometric application in micromeasurement
title_full_unstemmed	Studies on digital holography and interferometric application in micromeasurement
title_sort	studies on digital holography and interferometric application in micromeasurement
publishDate	2008
url	http://hdl.handle.net/10356/5436
_version_	1761781626234208256

Studies on digital holography and interferometric application in micromeasurement

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