Studies on digital holography and interferometric application in micromeasurement

• Main Author: Xu, Lei.
• Other Authors: Miao, Jianmin
• Format: Theses and Dissertations
• Published: 2008
• Subjects: DRNTU::Engineering::Manufacturing::Metrology
• Online Access: http://hdl.handle.net/10356/5436
• Institution: Nanyang Technological University

With the aim to improve the system performance and further extend the application scope to the rapidly growing microelectromechanical system (MEMS) engineering, the methodology of in-line digital micro-holo-interferometry (IDMHI) is proposed and its performance in micromeasurement is studied in thi...