Studies on digital holography and interferometric application in micromeasurement
With the aim to improve the system performance and further extend the application scope to the rapidly growing microelectromechanical system (MEMS) engineering, the methodology of in-line digital micro-holo-interferometry (IDMHI) is proposed and its performance in micromeasurement is studied in thi...
Saved in:
| Main Author: | |
|---|---|
| Other Authors: | |
| Format: | Theses and Dissertations |
| Published: |
2008
|
| Subjects: | |
| Online Access: | http://hdl.handle.net/10356/5436 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| Institution: | Nanyang Technological University |