Studies on digital holography and interferometric application in micromeasurement
With the aim to improve the system performance and further extend the application scope to the rapidly growing microelectromechanical system (MEMS) engineering, the methodology of in-line digital micro-holo-interferometry (IDMHI) is proposed and its performance in micromeasurement is studied in thi...
محفوظ في:
| المؤلف الرئيسي: | |
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| مؤلفون آخرون: | |
| التنسيق: | Theses and Dissertations |
| منشور في: |
2008
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| الموضوعات: | |
| الوصول للمادة أونلاين: | http://hdl.handle.net/10356/5436 |
| الوسوم: |
إضافة وسم
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| المؤسسة: | Nanyang Technological University |
| الملخص: | With the aim to improve the system performance and further extend the application scope to the rapidly growing microelectromechanical system (MEMS) engineering, the methodology of in-line digital micro-holo-interferometry (IDMHI) is proposed and its performance in
micromeasurement is studied in this thesis. In this thesis, the pressure sensor is employed as a typical example. |
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