Chemical characteristics of diamond-like carbon films

Chemical characteristics of diamond-like carbon films

In this work, a capacitance method of electrochemical impedance spectroscopy (EIS) has been developed to detect and evaluate nano pores in diamond-like carbon (DLC) films.

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Bibliographic Details
Main Author: Zeng, Aiping
Other Authors: Liu, Erjia
Format: Theses and Dissertations
Published: 2008
Subjects:
DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films
Online Access:http://hdl.handle.net/10356/5512
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Institution: Nanyang Technological University
Description
Summary:In this work, a capacitance method of electrochemical impedance spectroscopy (EIS) has been developed to detect and evaluate nano pores in diamond-like carbon (DLC) films.

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