Chemical characteristics of diamond-like carbon films

• Main Author: Zeng, Aiping
• Other Authors: Liu, Erjia
• Format: Theses and Dissertations
• Published: 2008
• Subjects: DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films
• Online Access: http://hdl.handle.net/10356/5512
• Institution: Nanyang Technological University

In this work, a capacitance method of electrochemical impedance spectroscopy (EIS) has been developed to detect and evaluate nano pores in diamond-like carbon (DLC) films.