Chemical characteristics of diamond-like carbon films

In this work, a capacitance method of electrochemical impedance spectroscopy (EIS) has been developed to detect and evaluate nano pores in diamond-like carbon (DLC) films.

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Bibliographic Details
Main Author:	Zeng, Aiping
Other Authors:	Liu, Erjia
Format:	Theses and Dissertations
Published:	2008
Subjects:	DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films
Online Access:	http://hdl.handle.net/10356/5512
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Institution:	Nanyang Technological University

id	sg-ntu-dr.10356-5512
record_format	dspace
spelling	sg-ntu-dr.10356-55122023-03-11T17:15:09Z Chemical characteristics of diamond-like carbon films Zeng, Aiping Liu, Erjia School of Mechanical and Production Engineering DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films In this work, a capacitance method of electrochemical impedance spectroscopy (EIS) has been developed to detect and evaluate nano pores in diamond-like carbon (DLC) films. Master of Engineering (MPE) 2008-09-17T10:52:24Z 2008-09-17T10:52:24Z 2002 2002 Thesis http://hdl.handle.net/10356/5512 Nanyang Technological University application/pdf
institution	Nanyang Technological University
building	NTU Library
continent	Asia
country	Singapore Singapore
content_provider	NTU Library
collection	DR-NTU
topic	DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films
spellingShingle	DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films Zeng, Aiping Chemical characteristics of diamond-like carbon films
description	In this work, a capacitance method of electrochemical impedance spectroscopy (EIS) has been developed to detect and evaluate nano pores in diamond-like carbon (DLC) films.
author2	Liu, Erjia
author_facet	Liu, Erjia Zeng, Aiping
format	Theses and Dissertations
author	Zeng, Aiping
author_sort	Zeng, Aiping
title	Chemical characteristics of diamond-like carbon films
title_short	Chemical characteristics of diamond-like carbon films
title_full	Chemical characteristics of diamond-like carbon films
title_fullStr	Chemical characteristics of diamond-like carbon films
title_full_unstemmed	Chemical characteristics of diamond-like carbon films
title_sort	chemical characteristics of diamond-like carbon films
publishDate	2008
url	http://hdl.handle.net/10356/5512
_version_	1761781993225322496

Chemical characteristics of diamond-like carbon films

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