Large surface profile measurement with instantaneous phase shifting interferometry
In this research, an optical layout that uses the concept of array of points with a modified Michelson interferometer has been proposed. With this setup, a relatively large surface area can be measured without the need for time consuming scanning. In combination with instantaneous phase shifting arr...
Saved in:
| Main Author: | |
|---|---|
| Other Authors: | |
| Format: | Theses and Dissertations |
| Published: |
2008
|
| Subjects: | |
| Online Access: | http://hdl.handle.net/10356/5813 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| Institution: | Nanyang Technological University |
| id |
sg-ntu-dr.10356-5813 |
|---|---|
| record_format |
dspace |
| spelling |
sg-ntu-dr.10356-58132023-03-11T17:23:10Z Large surface profile measurement with instantaneous phase shifting interferometry Hui, Wei Kee. Ngoi, Bryan Kok Ann School of Mechanical and Production Engineering DRNTU::Engineering::Manufacturing::Metrology In this research, an optical layout that uses the concept of array of points with a modified Michelson interferometer has been proposed. With this setup, a relatively large surface area can be measured without the need for time consuming scanning. In combination with instantaneous phase shifting arrangement, the system is therefore immune to vibration. Master of Engineering (MPE) 2008-09-17T10:59:44Z 2008-09-17T10:59:44Z 2003 2003 Thesis http://hdl.handle.net/10356/5813 Nanyang Technological University application/pdf |
| institution |
Nanyang Technological University |
| building |
NTU Library |
| continent |
Asia |
| country |
Singapore Singapore |
| content_provider |
NTU Library |
| collection |
DR-NTU |
| topic |
DRNTU::Engineering::Manufacturing::Metrology |
| spellingShingle |
DRNTU::Engineering::Manufacturing::Metrology Hui, Wei Kee. Large surface profile measurement with instantaneous phase shifting interferometry |
| description |
In this research, an optical layout that uses the concept of array of points with a modified Michelson interferometer has been proposed. With this setup, a relatively large surface area can be measured without the need for time consuming scanning. In combination with instantaneous phase shifting arrangement, the system is therefore immune to vibration. |
| author2 |
Ngoi, Bryan Kok Ann |
| author_facet |
Ngoi, Bryan Kok Ann Hui, Wei Kee. |
| format |
Theses and Dissertations |
| author |
Hui, Wei Kee. |
| author_sort |
Hui, Wei Kee. |
| title |
Large surface profile measurement with instantaneous phase shifting interferometry |
| title_short |
Large surface profile measurement with instantaneous phase shifting interferometry |
| title_full |
Large surface profile measurement with instantaneous phase shifting interferometry |
| title_fullStr |
Large surface profile measurement with instantaneous phase shifting interferometry |
| title_full_unstemmed |
Large surface profile measurement with instantaneous phase shifting interferometry |
| title_sort |
large surface profile measurement with instantaneous phase shifting interferometry |
| publishDate |
2008 |
| url |
http://hdl.handle.net/10356/5813 |
| _version_ |
1761781535560695808 |