Large surface profile measurement with instantaneous phase shifting interferometry

• Main Author: Hui, Wei Kee.
• Other Authors: Ngoi, Bryan Kok Ann
• Format: Theses and Dissertations
• Published: 2008
• Subjects: DRNTU::Engineering::Manufacturing::Metrology
• Online Access: http://hdl.handle.net/10356/5813
• Institution: Nanyang Technological University

In this research, an optical layout that uses the concept of array of points with a modified Michelson interferometer has been proposed. With this setup, a relatively large surface area can be measured without the need for time consuming scanning. In combination with instantaneous phase shifting arr...