Large surface profile measurement with instantaneous phase shifting interferometry
In this research, an optical layout that uses the concept of array of points with a modified Michelson interferometer has been proposed. With this setup, a relatively large surface area can be measured without the need for time consuming scanning. In combination with instantaneous phase shifting arr...
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| Format: | Theses and Dissertations |
| Published: |
2008
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| Online Access: | http://hdl.handle.net/10356/5813 |
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| Institution: | Nanyang Technological University |