Development of photo-resist application process using pre-wet technique

This project studies the application of edge bead remover (EBR) chemical as a pre-wet before dispensing the photo-resist on to the wafer.

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Bibliographic Details
Main Author: Anup Ramachandran
Other Authors: Zhao, Yong
Format: Theses and Dissertations
Published: 2008
Subjects:
Online Access:http://hdl.handle.net/10356/5873
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Institution: Nanyang Technological University

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