On-line shape measurement using micro-optics
Physical objects have three dimensional structures(3D). So that a profilometer that produce a 3D profile is invaluable. With the increasing demand for micro-products and bioengineering research, resolutions of 3D profiles with micrometer scale are becoming commonplace. In addition development of lar...
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Format: | Theses and Dissertations |
Published: |
2008
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Online Access: | https://hdl.handle.net/10356/5978 |
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Institution: | Nanyang Technological University |
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