On-line shape measurement using micro-optics

Physical objects have three dimensional structures(3D). So that a profilometer that produce a 3D profile is invaluable. With the increasing demand for micro-products and bioengineering research, resolutions of 3D profiles with micrometer scale are becoming commonplace. In addition development of lar...

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Bibliographic Details
Main Author: Li, Chongxiang
Other Authors: Fang Zhong Ping
Format: Theses and Dissertations
Published: 2008
Subjects:
Online Access:https://hdl.handle.net/10356/5978
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Institution: Nanyang Technological University
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