On-line shape measurement using micro-optics
Physical objects have three dimensional structures(3D). So that a profilometer that produce a 3D profile is invaluable. With the increasing demand for micro-products and bioengineering research, resolutions of 3D profiles with micrometer scale are becoming commonplace. In addition development of lar...
Saved in:
| Main Author: | |
|---|---|
| Other Authors: | |
| Format: | Theses and Dissertations |
| Published: |
2008
|
| Subjects: | |
| Online Access: | https://hdl.handle.net/10356/5978 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| Institution: | Nanyang Technological University |