Intelligent hybrid simulation modelling environment for cycle time management of semiconductor wafer fabrication

Semiconductor wafer fabrication is characterised by capital intensive, multi-stage process, compound of different types of workstations, and re-entrant material flows. Within most wafer fabrication facilities, the cycle time of a wafer is much greater than the processing time. It is desirable to kee...

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Bibliographic Details
Main Author: Lim, Wei Dong.
Other Authors: De Souza, Robert
Format: Theses and Dissertations
Published: 2008
Subjects:
Online Access:http://hdl.handle.net/10356/6045
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Institution: Nanyang Technological University
Description
Summary:Semiconductor wafer fabrication is characterised by capital intensive, multi-stage process, compound of different types of workstations, and re-entrant material flows. Within most wafer fabrication facilities, the cycle time of a wafer is much greater than the processing time. It is desirable to keep the cycle times manageable in the complex wafer fabrication systems.