Intelligent hybrid simulation modelling environment for cycle time management of semiconductor wafer fabrication
Semiconductor wafer fabrication is characterised by capital intensive, multi-stage process, compound of different types of workstations, and re-entrant material flows. Within most wafer fabrication facilities, the cycle time of a wafer is much greater than the processing time. It is desirable to kee...
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| Format: | Theses and Dissertations |
| Published: |
2008
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| Online Access: | http://hdl.handle.net/10356/6045 |
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| Institution: | Nanyang Technological University |