Intelligent hybrid simulation modelling environment for cycle time management of semiconductor wafer fabrication

Intelligent hybrid simulation modelling environment for cycle time management of semiconductor wafer fabrication

Semiconductor wafer fabrication is characterised by capital intensive, multi-stage process, compound of different types of workstations, and re-entrant material flows. Within most wafer fabrication facilities, the cycle time of a wafer is much greater than the processing time. It is desirable to kee...

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Main Author: Lim, Wei Dong.
Other Authors: De Souza, Robert
Format: Theses and Dissertations
Published: 2008
Subjects:
DRNTU::Engineering::Manufacturing::Production management
Online Access:http://hdl.handle.net/10356/6045
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Institution: Nanyang Technological University
id sg-ntu-dr.10356-6045
record_format dspace
spelling sg-ntu-dr.10356-60452023-03-11T17:08:22Z Intelligent hybrid simulation modelling environment for cycle time management of semiconductor wafer fabrication Lim, Wei Dong. De Souza, Robert School of Mechanical and Production Engineering DRNTU::Engineering::Manufacturing::Production management Semiconductor wafer fabrication is characterised by capital intensive, multi-stage process, compound of different types of workstations, and re-entrant material flows. Within most wafer fabrication facilities, the cycle time of a wafer is much greater than the processing time. It is desirable to keep the cycle times manageable in the complex wafer fabrication systems. Doctor of Philosophy (MPE) 2008-09-17T11:05:31Z 2008-09-17T11:05:31Z 2000 2000 Thesis http://hdl.handle.net/10356/6045 Nanyang Technological University application/pdf
institution Nanyang Technological University
building NTU Library
continent Asia
country Singapore
Singapore
content_provider NTU Library
collection DR-NTU
topic DRNTU::Engineering::Manufacturing::Production management
spellingShingle DRNTU::Engineering::Manufacturing::Production management
Lim, Wei Dong.
Intelligent hybrid simulation modelling environment for cycle time management of semiconductor wafer fabrication
description Semiconductor wafer fabrication is characterised by capital intensive, multi-stage process, compound of different types of workstations, and re-entrant material flows. Within most wafer fabrication facilities, the cycle time of a wafer is much greater than the processing time. It is desirable to keep the cycle times manageable in the complex wafer fabrication systems.
author2 De Souza, Robert
author_facet De Souza, Robert
Lim, Wei Dong.
format Theses and Dissertations
author Lim, Wei Dong.
author_sort Lim, Wei Dong.
title Intelligent hybrid simulation modelling environment for cycle time management of semiconductor wafer fabrication
title_short Intelligent hybrid simulation modelling environment for cycle time management of semiconductor wafer fabrication
title_full Intelligent hybrid simulation modelling environment for cycle time management of semiconductor wafer fabrication
title_fullStr Intelligent hybrid simulation modelling environment for cycle time management of semiconductor wafer fabrication
title_full_unstemmed Intelligent hybrid simulation modelling environment for cycle time management of semiconductor wafer fabrication
title_sort intelligent hybrid simulation modelling environment for cycle time management of semiconductor wafer fabrication
publishDate 2008
url http://hdl.handle.net/10356/6045
_version_ 1761781154289025024

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