Intelligent hybrid simulation modelling environment for cycle time management of semiconductor wafer fabrication

• Main Author: Lim, Wei Dong.
• Other Authors: De Souza, Robert
• Format: Theses and Dissertations
• Published: 2008
• Subjects: DRNTU::Engineering::Manufacturing::Production management
• Online Access: http://hdl.handle.net/10356/6045
• Institution: Nanyang Technological University

Semiconductor wafer fabrication is characterised by capital intensive, multi-stage process, compound of different types of workstations, and re-entrant material flows. Within most wafer fabrication facilities, the cycle time of a wafer is much greater than the processing time. It is desirable to kee...