Nanoindentation studies of polyimide thin films on silicon substrates
With the advancements in microelectronic industry and extensive use of thin films in the micro-devices, there has been an increasing interest in characterising their mechanical properties especially since they could be different from the identical bulk material. Nanoindentation has become a widely u...
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| Format: | Theses and Dissertations |
| Language: | English |
| Published: |
2014
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| Online Access: | http://hdl.handle.net/10356/60701 |
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| Institution: | Nanyang Technological University |
| Language: | English |