Nanoindentation studies of polyimide thin films on silicon substrates

• المؤلف الرئيسي: Yeo, Elaine
• مؤلفون آخرون: Yi Sung
• التنسيق: Theses and Dissertations
• اللغة: English
• منشور في: 2014
• الموضوعات: DRNTU::Engineering::Materials
• الوصول للمادة أونلاين: http://hdl.handle.net/10356/60701

With the advancements in microelectronic industry and extensive use of thin films in the micro-devices, there has been an increasing interest in characterising their mechanical properties especially since they could be different from the identical bulk material. Nanoindentation has become a widely u...