Nanoindentation studies of polyimide thin films on silicon substrates

• Main Author: Yeo, Elaine
• Other Authors: Yi Sung
• Format: Theses and Dissertations
• Language: English
• Published: 2014
• Subjects: DRNTU::Engineering::Materials
• Online Access: http://hdl.handle.net/10356/60701
• Institution: Nanyang Technological University

With the advancements in microelectronic industry and extensive use of thin films in the micro-devices, there has been an increasing interest in characterising their mechanical properties especially since they could be different from the identical bulk material. Nanoindentation has become a widely u...