Growth of carbonnanotubes for packaging applications
The goal of this project is to investigate various factors affecting the growth of Carbon Nanotubes (CNT) on Silicon (Si) substrate and thus investigate the optimized parameters for each factor. Factors include growth temperature, annealing temperature, Iron (Fe) catalyst thickness, and catalyst pat...
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| Format: | Final Year Project |
| Language: | English |
| Published: |
2014
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| Online Access: | http://hdl.handle.net/10356/61454 |
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| Institution: | Nanyang Technological University |
| Language: | English |
| Summary: | The goal of this project is to investigate various factors affecting the growth of Carbon Nanotubes (CNT) on Silicon (Si) substrate and thus investigate the optimized parameters for each factor. Factors include growth temperature, annealing temperature, Iron (Fe) catalyst thickness, and catalyst patterns. The quality of the CNT will also be looked into among several experiments and also to ensure that investigating the quality on 1 spot of the sample is equivalent to investigating any spots within the same sample. Also, how pressure and gases would affect the growth of CNT in TSV will also be looked into. |
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