Growth of carbonnanotubes for packaging applications

The goal of this project is to investigate various factors affecting the growth of Carbon Nanotubes (CNT) on Silicon (Si) substrate and thus investigate the optimized parameters for each factor. Factors include growth temperature, annealing temperature, Iron (Fe) catalyst thickness, and catalyst pat...

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Main Author: Koh, Wan Heng
Other Authors: Tay Beng Kang
Format: Final Year Project
Language:English
Published: 2014
Subjects:
Online Access:http://hdl.handle.net/10356/61454
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Institution: Nanyang Technological University
Language: English
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spelling sg-ntu-dr.10356-614542023-07-07T15:53:33Z Growth of carbonnanotubes for packaging applications Koh, Wan Heng Tay Beng Kang School of Electrical and Electronic Engineering DRNTU::Engineering::Electrical and electronic engineering The goal of this project is to investigate various factors affecting the growth of Carbon Nanotubes (CNT) on Silicon (Si) substrate and thus investigate the optimized parameters for each factor. Factors include growth temperature, annealing temperature, Iron (Fe) catalyst thickness, and catalyst patterns. The quality of the CNT will also be looked into among several experiments and also to ensure that investigating the quality on 1 spot of the sample is equivalent to investigating any spots within the same sample. Also, how pressure and gases would affect the growth of CNT in TSV will also be looked into. Bachelor of Engineering 2014-06-10T06:51:55Z 2014-06-10T06:51:55Z 2014 2014 Final Year Project (FYP) http://hdl.handle.net/10356/61454 en Nanyang Technological University 63 p. application/pdf
institution Nanyang Technological University
building NTU Library
continent Asia
country Singapore
Singapore
content_provider NTU Library
collection DR-NTU
language English
topic DRNTU::Engineering::Electrical and electronic engineering
spellingShingle DRNTU::Engineering::Electrical and electronic engineering
Koh, Wan Heng
Growth of carbonnanotubes for packaging applications
description The goal of this project is to investigate various factors affecting the growth of Carbon Nanotubes (CNT) on Silicon (Si) substrate and thus investigate the optimized parameters for each factor. Factors include growth temperature, annealing temperature, Iron (Fe) catalyst thickness, and catalyst patterns. The quality of the CNT will also be looked into among several experiments and also to ensure that investigating the quality on 1 spot of the sample is equivalent to investigating any spots within the same sample. Also, how pressure and gases would affect the growth of CNT in TSV will also be looked into.
author2 Tay Beng Kang
author_facet Tay Beng Kang
Koh, Wan Heng
format Final Year Project
author Koh, Wan Heng
author_sort Koh, Wan Heng
title Growth of carbonnanotubes for packaging applications
title_short Growth of carbonnanotubes for packaging applications
title_full Growth of carbonnanotubes for packaging applications
title_fullStr Growth of carbonnanotubes for packaging applications
title_full_unstemmed Growth of carbonnanotubes for packaging applications
title_sort growth of carbonnanotubes for packaging applications
publishDate 2014
url http://hdl.handle.net/10356/61454
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