Precision machining with a vibration device
This dissertation studies grinding of single-crystal Si with a vibration device. Si samples were cut from (100) silicon wafer. The vibration device was employed to hold the sample. The device was placed on the grinding machine table. The grinding direction is parallel to [110] direction of (100) sil...
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| Format: | Theses and Dissertations |
| Published: |
2008
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| Online Access: | http://hdl.handle.net/10356/6338 |
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| Institution: | Nanyang Technological University |