Characterisation of multi-element (Nb, Cr) N thin films deposited by unbalanced magnetron sputtering

Characterisation of multi-element (Nb, Cr) N thin films deposited by unbalanced magnetron sputtering

Tool steels have long been used to manufacture tools for high speed cutting and machining due to its excellent strength, toughness, and heat resistance. However, though the excellent mechanical properties, the tool surface and near surface regions are subjected to the most destructive forces, for ex...

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Bibliographic Details
Main Author: Tan, Jen Ngee.
Other Authors: Hsieh, Joe Jang-Hsing
Format: Theses and Dissertations
Published: 2008
Subjects:
DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films
Online Access:http://hdl.handle.net/10356/6460
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Institution: Nanyang Technological University
Description
Summary:Tool steels have long been used to manufacture tools for high speed cutting and machining due to its excellent strength, toughness, and heat resistance. However, though the excellent mechanical properties, the tool surface and near surface regions are subjected to the most destructive forces, for example, wear, high stresses, elevated temperatures, and corrosive environments.

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