Characterisation of multi-element (Nb, Cr) N thin films deposited by unbalanced magnetron sputtering

Characterisation of multi-element (Nb, Cr) N thin films deposited by unbalanced magnetron sputtering

Tool steels have long been used to manufacture tools for high speed cutting and machining due to its excellent strength, toughness, and heat resistance. However, though the excellent mechanical properties, the tool surface and near surface regions are subjected to the most destructive forces, for ex...

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Main Author: Tan, Jen Ngee.
Other Authors: Hsieh, Joe Jang-Hsing
Format: Theses and Dissertations
Published: 2008
Subjects:
DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films
Online Access:http://hdl.handle.net/10356/6460
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Institution: Nanyang Technological University
id sg-ntu-dr.10356-6460
record_format dspace
spelling sg-ntu-dr.10356-64602023-03-11T17:04:43Z Characterisation of multi-element (Nb, Cr) N thin films deposited by unbalanced magnetron sputtering Tan, Jen Ngee. Hsieh, Joe Jang-Hsing School of Mechanical and Production Engineering DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films Tool steels have long been used to manufacture tools for high speed cutting and machining due to its excellent strength, toughness, and heat resistance. However, though the excellent mechanical properties, the tool surface and near surface regions are subjected to the most destructive forces, for example, wear, high stresses, elevated temperatures, and corrosive environments. Master of Science (Precision Engineering) 2008-09-17T11:15:29Z 2008-09-17T11:15:29Z 2002 2002 Thesis http://hdl.handle.net/10356/6460 Nanyang Technological University application/pdf
institution Nanyang Technological University
building NTU Library
continent Asia
country Singapore
Singapore
content_provider NTU Library
collection DR-NTU
topic DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films
spellingShingle DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films
Tan, Jen Ngee.
Characterisation of multi-element (Nb, Cr) N thin films deposited by unbalanced magnetron sputtering
description Tool steels have long been used to manufacture tools for high speed cutting and machining due to its excellent strength, toughness, and heat resistance. However, though the excellent mechanical properties, the tool surface and near surface regions are subjected to the most destructive forces, for example, wear, high stresses, elevated temperatures, and corrosive environments.
author2 Hsieh, Joe Jang-Hsing
author_facet Hsieh, Joe Jang-Hsing
Tan, Jen Ngee.
format Theses and Dissertations
author Tan, Jen Ngee.
author_sort Tan, Jen Ngee.
title Characterisation of multi-element (Nb, Cr) N thin films deposited by unbalanced magnetron sputtering
title_short Characterisation of multi-element (Nb, Cr) N thin films deposited by unbalanced magnetron sputtering
title_full Characterisation of multi-element (Nb, Cr) N thin films deposited by unbalanced magnetron sputtering
title_fullStr Characterisation of multi-element (Nb, Cr) N thin films deposited by unbalanced magnetron sputtering
title_full_unstemmed Characterisation of multi-element (Nb, Cr) N thin films deposited by unbalanced magnetron sputtering
title_sort characterisation of multi-element (nb, cr) n thin films deposited by unbalanced magnetron sputtering
publishDate 2008
url http://hdl.handle.net/10356/6460
_version_ 1761781156048535552

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