Characterisation of multi-element (Nb, Cr) N thin films deposited by unbalanced magnetron sputtering

• Main Author: Tan, Jen Ngee.
• Other Authors: Hsieh, Joe Jang-Hsing
• Format: Theses and Dissertations
• Published: 2008
• Subjects: DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films
• Online Access: http://hdl.handle.net/10356/6460
• Institution: Nanyang Technological University

Tool steels have long been used to manufacture tools for high speed cutting and machining due to its excellent strength, toughness, and heat resistance. However, though the excellent mechanical properties, the tool surface and near surface regions are subjected to the most destructive forces, for ex...