Characterization and optimization of aluminum nitride, poly silicon/thick silicon oxide and inter-facial investigation of Al-Ge eutectic bond

• Main Author: Kugatharshine, Selvaratnam
• Other Authors: Tian Jingze
• Format: Final Year Project
• Language: English
• Published: 2015
• Subjects: DRNTU::Engineering::Electrical and electronic engineering
• Online Access: http://hdl.handle.net/10356/65691
• Institution: Nanyang Technological University

This project mainly documents the theory, experimental results and analysis of local stress and full map stress measurement of Aluminum Nitride film using SEMDEX A21, investigation of interface of Al-Ge Eutectic bond and startup and evaluation of Filmetrics (F64-c). Residual stress is a critical iss...