Development of a linear micro actuator for ultra-precision positioning (Vol.1)

• Main Authors: Du, Hejun, Lim, Mong King, Ling, Shih Fu, Gong, Thomas Haiqing, Lin, Rongming, Hung, Nguyen Phu
• Format: Research Report
• Published: 2008
• Subjects: DRNTU::Engineering::Manufacturing::Product engineering
• Online Access: http://hdl.handle.net/10356/6918
• Institution: Nanyang Technological University

There is a strong demand for ultra-high precision positioning devices in many modern precision machines and devices, such as hard disk drives, CD/LD devices, wafer fabrication machines, optical fibre devices and measurement/testing equipment of micro devices. The requirement for resolution or positi...