Development of MEMS devices for vibration and acoustic sensing and actuation applications

This report presents the development of MEMS devices for vibration and acoustic sensing and actuation applications under project JT ARC 6/97. In this project, a total of 23 international journal papers and 14 conference papers have been produced. The project was actually kicked off early 1998. We h...

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Main Authors:	Lin, Rongming, Lim, Mong King, Ling, Shih Fu, Du, Hejun, Miao, Jianmin
Other Authors:	School of Mechanical and Production Engineering
Format:	Research Report
Published:	2008
Subjects:	DRNTU::Engineering::Electrical and electronic engineering::Microelectromechanical systems
Online Access:	http://hdl.handle.net/10356/6919
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Institution:	Nanyang Technological University

id	sg-ntu-dr.10356-6919
record_format	dspace
spelling	sg-ntu-dr.10356-69192020-06-01T10:44:38Z Development of MEMS devices for vibration and acoustic sensing and actuation applications Lin, Rongming Lim, Mong King Ling, Shih Fu Du, Hejun Miao, Jianmin School of Mechanical and Production Engineering DRNTU::Engineering::Electrical and electronic engineering::Microelectromechanical systems This report presents the development of MEMS devices for vibration and acoustic sensing and actuation applications under project JT ARC 6/97. In this project, a total of 23 international journal papers and 14 conference papers have been produced. The project was actually kicked off early 1998. We have been working on MEMS devices such as capacitive comb-driven micro-gyroscope, capacitive microphone, floating-electrode-electret-microphone, MEMS GHz micro-switch, ultrasonic transducer, single-chip integrated fluid systems, optical cross-connect switch, and development of lower stress film and bimetallic films for actuation applications. 2008-09-17T14:37:04Z 2008-09-17T14:37:04Z 2002 2002 Research Report http://hdl.handle.net/10356/6919 Nanyang Technological University application/pdf
institution	Nanyang Technological University
building	NTU Library
country	Singapore
collection	DR-NTU
topic	DRNTU::Engineering::Electrical and electronic engineering::Microelectromechanical systems
spellingShingle	DRNTU::Engineering::Electrical and electronic engineering::Microelectromechanical systems Lin, Rongming Lim, Mong King Ling, Shih Fu Du, Hejun Miao, Jianmin Development of MEMS devices for vibration and acoustic sensing and actuation applications
description	This report presents the development of MEMS devices for vibration and acoustic sensing and actuation applications under project JT ARC 6/97. In this project, a total of 23 international journal papers and 14 conference papers have been produced. The project was actually kicked off early 1998. We have been working on MEMS devices such as capacitive comb-driven micro-gyroscope, capacitive microphone, floating-electrode-electret-microphone, MEMS GHz micro-switch, ultrasonic transducer, single-chip integrated fluid systems, optical cross-connect switch, and development of lower stress film and bimetallic films for actuation applications.
author2	School of Mechanical and Production Engineering
author_facet	School of Mechanical and Production Engineering Lin, Rongming Lim, Mong King Ling, Shih Fu Du, Hejun Miao, Jianmin
format	Research Report
author	Lin, Rongming Lim, Mong King Ling, Shih Fu Du, Hejun Miao, Jianmin
author_sort	Lin, Rongming
title	Development of MEMS devices for vibration and acoustic sensing and actuation applications
title_short	Development of MEMS devices for vibration and acoustic sensing and actuation applications
title_full	Development of MEMS devices for vibration and acoustic sensing and actuation applications
title_fullStr	Development of MEMS devices for vibration and acoustic sensing and actuation applications
title_full_unstemmed	Development of MEMS devices for vibration and acoustic sensing and actuation applications
title_sort	development of mems devices for vibration and acoustic sensing and actuation applications
publishDate	2008
url	http://hdl.handle.net/10356/6919
_version_	1681056100811538432

Development of MEMS devices for vibration and acoustic sensing and actuation applications

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