Development of MEMS devices for vibration and acoustic sensing and actuation applications

• Main Authors: Lin, Rongming, Lim, Mong King, Ling, Shih Fu, Du, Hejun, Miao, Jianmin
• Other Authors: School of Mechanical and Production Engineering
• Format: Research Report
• Published: 2008
• Subjects: DRNTU::Engineering::Electrical and electronic engineering::Microelectromechanical systems
• Online Access: http://hdl.handle.net/10356/6919
• Institution: Nanyang Technological University

This report presents the development of MEMS devices for vibration and acoustic sensing and actuation applications under project JT ARC 6/97. In this project, a total of 23 international journal papers and 14 conference papers have been produced. The project was actually kicked off early 1998. We h...