Computational analysis and chemical mechanical polishing for manufacturing of optical components

• Main Author: Nguyen, Nhu Y
• Other Authors: Zhong Zhaowei
• Format: Theses and Dissertations
• Language: English
• Published: 2017
• Subjects: DRNTU::Engineering::Mechanical engineering::Assistive technology
• Online Access: http://hdl.handle.net/10356/69489
• Institution: Nanyang Technological University

High precision optical components are required for modern life and future. To achieve component’s surfaces with high quality, chemical mechanical polishing (CMP) is required. It is a unique method to obtain the global uniformity planarization across the surface without scratches. In the polishing of...