Research and development of compliant micro-electro-mechanical systems (MEMS)

Research and development of compliant micro-electro-mechanical systems (MEMS)

This project investigates the fabrication and characterization of two-dimensional resoant micromirror device actuated by sol-gel deposited PZT thin films. The piezoelectric PZT thin films with silicon micromachining technology provide the advantages of high scanning frequencies and low driving volt...

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Bibliographic Details
Main Author: Xiao, Zhongmin
Other Authors: School of Mechanical and Production Engineering
Format: Research Report
Published: 2008
Subjects:
DRNTU::Engineering::Mechanical engineering::Mechatronics
Online Access:http://hdl.handle.net/10356/6977
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Institution: Nanyang Technological University
Description
Summary:This project investigates the fabrication and characterization of two-dimensional resoant micromirror device actuated by sol-gel deposited PZT thin films. The piezoelectric PZT thin films with silicon micromachining technology provide the advantages of high scanning frequencies and low driving voltages.

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