Research and development of compliant micro-electro-mechanical systems (MEMS)
This project investigates the fabrication and characterization of two-dimensional resoant micromirror device actuated by sol-gel deposited PZT thin films. The piezoelectric PZT thin films with silicon micromachining technology provide the advantages of high scanning frequencies and low driving volt...
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| 格式: | Research Report |
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2008
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| 在線閱讀: | http://hdl.handle.net/10356/6977 |
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