Research and development of compliant micro-electro-mechanical systems (MEMS)

• Main Author: Xiao, Zhongmin
• Other Authors: School of Mechanical and Production Engineering
• Format: Research Report
• Published: 2008
• Subjects: DRNTU::Engineering::Mechanical engineering::Mechatronics
• Online Access: http://hdl.handle.net/10356/6977
• Institution: Nanyang Technological University

This project investigates the fabrication and characterization of two-dimensional resoant micromirror device actuated by sol-gel deposited PZT thin films. The piezoelectric PZT thin films with silicon micromachining technology provide the advantages of high scanning frequencies and low driving volt...