Research and development of compliant micro-electro-mechanical systems (MEMS)

Research and development of compliant micro-electro-mechanical systems (MEMS)

This project investigates the fabrication and characterization of two-dimensional resoant micromirror device actuated by sol-gel deposited PZT thin films. The piezoelectric PZT thin films with silicon micromachining technology provide the advantages of high scanning frequencies and low driving volt...

Full description

Saved in:
Bibliographic Details
Main Author: Xiao, Zhongmin
Other Authors: School of Mechanical and Production Engineering
Format: Research Report
Published: 2008
Subjects:
DRNTU::Engineering::Mechanical engineering::Mechatronics
Online Access:http://hdl.handle.net/10356/6977
Tags: Add Tag
No Tags, Be the first to tag this record!
Institution: Nanyang Technological University
id sg-ntu-dr.10356-6977
record_format dspace
spelling sg-ntu-dr.10356-69772023-03-04T18:05:47Z Research and development of compliant micro-electro-mechanical systems (MEMS) Xiao, Zhongmin School of Mechanical and Production Engineering DRNTU::Engineering::Mechanical engineering::Mechatronics This project investigates the fabrication and characterization of two-dimensional resoant micromirror device actuated by sol-gel deposited PZT thin films. The piezoelectric PZT thin films with silicon micromachining technology provide the advantages of high scanning frequencies and low driving voltages. RG 28/97 2008-09-17T14:38:34Z 2008-09-17T14:38:34Z 2001 2001 Research Report http://hdl.handle.net/10356/6977 Nanyang Technological University application/pdf
institution Nanyang Technological University
building NTU Library
continent Asia
country Singapore
Singapore
content_provider NTU Library
collection DR-NTU
topic DRNTU::Engineering::Mechanical engineering::Mechatronics
spellingShingle DRNTU::Engineering::Mechanical engineering::Mechatronics
Xiao, Zhongmin
Research and development of compliant micro-electro-mechanical systems (MEMS)
description This project investigates the fabrication and characterization of two-dimensional resoant micromirror device actuated by sol-gel deposited PZT thin films. The piezoelectric PZT thin films with silicon micromachining technology provide the advantages of high scanning frequencies and low driving voltages.
author2 School of Mechanical and Production Engineering
author_facet School of Mechanical and Production Engineering
Xiao, Zhongmin
format Research Report
author Xiao, Zhongmin
author_sort Xiao, Zhongmin
title Research and development of compliant micro-electro-mechanical systems (MEMS)
title_short Research and development of compliant micro-electro-mechanical systems (MEMS)
title_full Research and development of compliant micro-electro-mechanical systems (MEMS)
title_fullStr Research and development of compliant micro-electro-mechanical systems (MEMS)
title_full_unstemmed Research and development of compliant micro-electro-mechanical systems (MEMS)
title_sort research and development of compliant micro-electro-mechanical systems (mems)
publishDate 2008
url http://hdl.handle.net/10356/6977
_version_ 1759853041074307072

Similar Items