Deposition of antimony on wafer by using sputtering system
Antimony thin film is first deposited on the substrate by using the newly set-up sputtering system in Nanoelectronics Lab 1 (NEL1) through sputter deposition process. A thorough study on the newly set-up sputtering system has been done. By varying the deposition duration, we can manipulate the thick...
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| Format: | Final Year Project |
| Language: | English |
| Published: |
2019
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| Online Access: | http://hdl.handle.net/10356/77912 |
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| Institution: | Nanyang Technological University |
| Language: | English |