Deposition of antimony on wafer by using sputtering system

• Main Author: Kam, Shu Xia
• Other Authors: Tay Beng Kang
• Format: Final Year Project
• Language: English
• Published: 2019
• Subjects: DRNTU::Engineering::Electrical and electronic engineering
• Online Access: http://hdl.handle.net/10356/77912
• Institution: Nanyang Technological University

Antimony thin film is first deposited on the substrate by using the newly set-up sputtering system in Nanoelectronics Lab 1 (NEL1) through sputter deposition process. A thorough study on the newly set-up sputtering system has been done. By varying the deposition duration, we can manipulate the thick...